Ohki, Shigehisa: search on Z-Library

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1

Opto-Electronic Chip-on-Film Packaging Technology Using Low-CTE Fluorinated Polyimide Optical Waveguide Films

Usui, Mitsuo, Ishibashi, Shigeki, Hirata, Hirooki, Ishizawa, Suzuko, Koshoubu, Nobutatsu, Hayashi, Tsuyoshi, Ohki, Shigehisa

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2014

Language:

english

File:

PDF, 2.09 MB

english, 2014

2

A new ultrafine groove fabrication method utilizing electron cyclotron resonance plasma deposition and reactive ion etching

Ohki, Shigehisa

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

1988

Language:

english

File:

PDF, 737 KB

english, 1988

3

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Emerging Lithographic Technologies IV - Delineation performances of advanced 100-kV EB writer on x-ray membrane mask

Nakayama, Yoshinori, Aoyama, Hajime, Tsuboi, Shinji, Watanabe, Hiroshi, Kikuchi, Yukiko, Ezaki, Mizunori, Matsui, Yasuji, Morosawa, Tetsuo, Saito, Kenichi, Ohki, Shigehisa, Matsuda, Tadahito, Dobisz,

Year:

2000

Language:

english

File:

PDF, 1.75 MB

english, 2000

4

Evaluation of image placement correction method for EB X-ray mask writing

Toshifumi Watanabe, Shigehisa Ohki, Shingo Uchiyama

Journal:

Microelectronic Engineering

Year:

2001

Language:

english

File:

PDF, 200 KB

english, 2001

5

X-Ray Mask Fabrication Using New Membrane Process Techniques

Uchiyama, Shingo, Oda, Masatoshi, Matsuda, Tadahito, Ohki, Shigehisa

Journal:

Japanese Journal of Applied Physics

Year:

1997

File:

PDF, 1.51 MB

1997

6

Ta/SiN-Structure X-Ray Masks for Sub-Half-Micron LSIs

Ohki, Shigehisa, Kakuchi, Masami, Matsuda, Tadahito, Ozawa, Akira, Ohkubo, Takashi, Oda, Masatoshi, Yoshihara, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 209 KB

english, 1989

7

X-Ray Mask Pattern Accuracy Improvement by Superimposing Multiple Exposures Using Different Field Sizes

Ohki, Shigehisa, Matsuda, Tadahito, Yoshihara, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1993

File:

PDF, 2.09 MB

1993

8

X-ray mask distortion analysis using the boundary element method

Ohki, Shigehisa

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

1990

Language:

english

File:

PDF, 701 KB

english, 1990

9

Electric Field Induced Reflection in GaInAsP/InP MQW Structure

Kikugawa, Tomoyuki, Ravikumar, K. G., Shimomura, Kazuhiko, Izumi, Akira, Arai, Shigehisa, Suematsu, Yasuharu, Ohki, Yoshimasa

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 625 KB

1987

10

Photoinduced Optical Changes in Amorphous Silicon-Carbon Alloy Prepared by Reactive Sputtering in an Atmosphere of Propane

Iida, Seishi, Ohki, Shigehisa

Journal:

Japanese Journal of Applied Physics

Year:

1982

File:

PDF, 579 KB

1982

11

Ta Film Properties for X-Ray Mask Absorbers

Oda, Masatoshi, Ozawa, Akira, Ohki, Shigehisa, Yoshihara, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1990

File:

PDF, 464 KB

1990

12

A New Proximity Parameter Evaluation Method Utilizing Auxiliary Patterns for Dose Compensation

Uchiyama, Shingo, Ohki, Shigehisa, Matsuda, Tadahito

Journal:

Japanese Journal of Applied Physics

Year:

1993

Language:

english

File:

PDF, 838 KB

english, 1993

13

An overview of X-ray lithography

Shigehisa Ohki, Sunao Ishihara

Journal:

Microelectronic Engineering

Year:

1996

Language:

english

File:

PDF, 1.84 MB

english, 1996

14

Simulation of X-Ray Mask Distortion

Oda, Masatoshi, Ohki, Shigehisa, Ozawa, Akira, Ohkubo, Takashi, Yoshihara, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 289 KB

english, 1992

15

High-accuracy X-ray masks with sub-half-micron 1M-DRAM chips

Shigehisa Ohki, Masatoshi Oda, Masami Kakuchi, Hideo Yoshihara

Journal:

Microelectronic Engineering

Year:

1991

Language:

english

File:

PDF, 325 KB

english, 1991

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